A highly manufacturable deep trench based DRAM cell layout with a planar array device in a 70nm technology
IEEE INTERNATIONAL ELECTRON DEVICES MEETING 2004, TECHNICAL DIGEST
Authors: Amon, J; Kieslich, A; Heineck, L; Faul, TSJ; Luetzen, J; Fan, C; Huang, CC; Fischer, B; Enders, G; Kudelka, S; Schroeder, U; Kuesters, KH; Lange, G; Alsmeier, J
Abstract
For the first time, a new DRAM cell layout as the key enabler for future DRAM shrink generations based on deep trench (DT) technologies with a planar array device is presented. The work describes the full integration scheme in 70nm technology and the major technology features of the 'checkerboard (CKB)' layout. The new layout is beneficial for lithography and high aspect ratio etch processes. In addition, the high degree of symmetry enables easily the integration of a self aligned trench bottling process on a [100] rotated substrate with an outstanding utilization of area for the capacitor. Further capacitance enhancement up to 50% is achieved for the first time in a trench process by introduction of hemispherical silicon grains (HSG) with high k dielectric material (Al2O3). Additionally, a new self aligned trench-cell connection (single sided buried strap) technique with a novel isolation trench (IT) pre fill process will be presented in the paper.
Effects of osmolytes on the refolding of recombinant Pelodiscus sinensis brain-type creatine kinase
PROCESS BIOCHEMISTRY
Authors: Sun, Xiao-Bao; Lim, Gyu Tae; Lee, Jinhyuk; Wan, Jia-Xin; Lin, Hai-Zhen; Yang, Jun-Mo; Wang, Qian; Park, Yong-Doo
Abstract
The protective effects of osmolytes on the renaturation of Pelodiscus sinensis brain-type creatine kinase (P-CKB) were determined in this study. The P-CKB gene was cloned and was heterologously expressed in Escherichia coli BL21 (DE3). The purified recombinant protein was subjected to 6 M urea denaturation and further applied with six different osmolytes (glycine, proline, sorbitol, DMSO, betaine, and trehalose). Our results demonstrated that the addition of glycine or DMSO could contribute toward the reactivation of unfolded P-CKB and prevent aggregation. Interestingly, 25 mM glycine was found to be the best concentration to reactivate denatured P-CKB, while high-concentration glycine led to the opposite effect as monitored by a red shift in the intrinsic fluorescence spectra and the aggregation of protein, which probably could be attributed to an additional inactive protein complex that formed during the fast refolding reaction. Docking simulation results showed the osmolyte docking energies to be relatively low and clustering groups were spread on the surface of P-CKB, indicating that osmolytes directly protected the surface of P-CKB. The results in this study could provide a better understanding of structural and functional changes in P-CKB during refolding in addition to the role of osmolytes in heterothermic animals.