Amine Functionalized Glass Slide provides reactive amine groups for coupling with activated carboxyls or for electrostatic adsorption of negatively charged species. The substrate surface is activated using high-energy plasma to effectively remove organic contaminants and generate a high density of reactive hydroxyl groups, significantly enhancing surface reactivity. Subsequently, vapor-phase silanization enables precise control over the grafting density of silane molecules, ensuring a uniform nanoscale distribution of amine functional groups.